Upcoming 14A and 10A process nodes will use high-NA EUV anamorphic scanners, which will require two stitched half-fields to achieve the equivalent wafer exposure area of previous-generation scanners, ...

Have you ever thought about how and why something was designed? Who was considered a “stakeholder” for the design? And what biases are baked within the process of designing something? These are some ...

Chemical product and process design constitutes a multidisciplinary endeavour integrating chemical engineering principles, advanced computational methods and sustainability objectives to develop ...